Phd: Fano4nano

**PhD: Fano4nano - Fano resonance enhanced scatterometry for wafer metrology**:
**Work Activities**:
We aim to develop a completely new class of metrology targets, based on novel nanophotonic scattering patterns taken from the optical metasurface community. Examples of such patterns are Fano-resonant metasurfaces that can provide responses in spectrum, polarization and diffraction with a very strong dependency on geometry. The challenge in this project is how to systematically design Fano-resonant metasurfaces that answer to the boundary conditions of semiconductor metrology.

We are seeking two PhD students, targeting this problem from two complementary perspectives:

- Why are certain Fano-resonant motifs better at transducing geometrical variations than others, and what are the best read out schemes for metrology ? Your focus is on developing mechanistic understanding, using modal analysis and developing perturbation theory for metrology which can aid global optimization methods.

While the work will mainly focus on theory and simulation, for both projects promising Fano-resonant metasurfaces will be manufactured and measured. In project 1 you will demonstrate the limits of performance of select designs in close collaboration with ASML, while in project 2 you will demonstrate salient mechanisms in optical experiments at AMOLF performed with help of a research technician.

The research is part of an industry co-funded project, and will be done in close collaboration with ASML. We target both academic and applied breakthroughs.

**Qualifications**:
**Work environment**:
**About the group**
This is a collaborative project between the Resonant Nanophotonics group at AMOLF, headed by Prof. Dr. Femius Koenderink and Prof. Dr. Irwan Setija at TU/e (PSN group). The research activities in the Resonant Nanophotonics group at AMOLF aim at developing nanoscale photonic structures, such as plasmonics and metasurfaces, to control scattering, emission, amplification and detection of light. The group spans the entire research cycle from developing advanced nanophotonics concepts using state of the art theory and numerical design, to nanofabrication of designed structures in the Amsterdam NanoLab cleanroom at AMOLF, and the development of state of the art optical scatterometry and microscopy methods. Prof. Setija is a principal scientist at ASML Research and part-time professor at the Technical University Eindhoven in semiconductor metrology and sensing, and particularly in electromagnetic theory, developing numerical methods, large-scale optimization, and electromagnetic design.

**Working conditions**:

- The working atmosphere at the institute is largely determined by young, enthusiastic, mostly foreign employees. Communication is informal and runs through short lines of communication.
- The position is intended as full-time (40 hours / week, 12 months / year) appointment in the service of the Netherlands Foundation of Scientific Research Institutes (NWO-I) for the duration of four years
- The starting salary is 2.781 Euro’s gross per month and a range of employment benefits.
- After successful completion of the PhD research a PhD degree will be granted at a Dutch University.
- Several courses are offered, specially developed for PhD-students.

**More information?**:
For further information about the position, please contact Prof.dr. Femius Koenderink

Prof.dr. Femius Koenderink
Group leader Resonant Nanophotonics
Phone: +31 (0)20-754 7100

**Application**:
Please annex your:

- Resume;
- Motivation on why you want to join the group (max. 1 page).

Applications will be evaluated on a rolling basis and as soon as an excellent match is made, the position will be filled.
- Online screening may be part of the selection._

**Diversity code**:
AMOLF has won the NNV Diversity Award 2022, which is awarded every two years by the Netherlands Physical Society for demonstrating the most successful implementation of equality, diversity and inclusion (EDI).

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