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Mechanical Engineering Internship: Developing a Micro-slip Verification Method
2 maanden geleden
We are seeking a highly motivated and detail-oriented Master's student in Mechanical Engineering to join our team at ASML as an intern. The successful candidate will have the opportunity to work on a challenging project that involves developing a micro-slip verification method.
Background InformationThe Sensors Mechanics group at ASML is responsible for designing optical sensor systems, including wafer height measurement systems, broadband light sources, and projection accuracy. Our team is working on developing image sensors that are located on the wafer stage and are used to measure various parameters, such as the position of the focal plane of the projection lens, light energy, optical aberrations, and the position of the stage with respect to a reference. These sensors need to be stable at sub-nanometer level, and we are experiencing high accelerations that cause high forces on the mechanical connections between the sensors and the wafer stage, leading to possible sub-nanometer micro-slip.
Your AssignmentWe would like you to define a test setup in which the micro-slip phenomenon can be simulated by applying a fluctuating force on a sensor-wafer stage connection while measuring the displacement in a specific measurement device capable of operating under vacuum conditions. The test setup must fit well with our existing equipment and trigger the micro-slip phenomenon. Some of your tasks may include:
- Getting familiar with the picometer measurement setup of VSL;
- Determining the building envelope for the test setup to apply forces on a mock-up sensor-wafer stage connection;
- Defining a concept design for the test setup, reviewing it with the ASML team, and making a final design including drawings;
- Building a prototype test setup and verifying its proper operation in the measurement setup of VSL;
- Conducting a first set of measurements to demonstrate the functionality of the setup;
- Reporting on your activities and achievements.
To be the match for this internship, you should have:
- A Master's degree in Mechanical Engineering, preferably with a focus on precision engineering and/or mechatronics;
- Good communication skills in English (verbal and written);
- A solution-oriented and hands-on mentality;
- Ability to travel between Eindhoven and Delft for cross-collaboration.
ASML is a leading supplier of lithography machines for the semiconductor industry. We take pride in our innovative technology and commitment to excellence. Our company values diversity and inclusion, and we strive to create an environment where everyone feels welcome and empowered to contribute. If you are passionate about precision engineering and mechatronics, and you are looking for a challenging internship that will help you grow professionally and personally, we encourage you to apply.
