Mechatronics Internship: Pressure Feedforward for

**Introduction**:
There is a trend of chips becoming cheaper and shrinking of the feature sizes on chips (Moore’s law). In lithography equipment for fabrication of chips, this means a trend of tighter accuracy specs combined with increased excitation levels due to higher throughput. This creates a challenge for the vibration isolation systems within the ASML scanners. Dynamic stiffness (frequency dependent stiffness) can be used as a measure to characterize the isolation performance of such an isolation system. In this regard, the System Dynamics group, within the Mechatronics & Measurement Systems department, defines the dynamics architecture of the scanner including the vibration isolation systems. System Dynamics also develops hardware for vibration isolation systems.

**Your Assignment**:
Lithographic scanner performance is sensitive to vibrations from the outside world. Vibration isolation is paramount in such systems and active vibration isolators are commonly used to tackle this issue. The aim of this assigment is to develop a disturbance feedforward controller improving transmissibility over a desired frequency range. The controller will also need to be validated on the available test rig. The main tasks include:

- Conduct a literature review on disturbance feedforward control techniques, system modelling, and related previous studies;
- Familiarize yourself with the physics of the vibration isolator and control framework;
- Run experiments on the testrig to perform: system identification, model updating, physical feedback path quantification, transmissibility calculation (this would also require integrating a suitable sensor to the setup);
- Design, test, and compare different disturbance feedforward control strategies to improve dynamic stiffness over the desired frequency range(s) on the updated dynamical model;
- Validate the controller(s) on the testrig and quantify: improvement in transmissibility, robustness of controller to model uncertainty, sensitivity to sensor noise and different disturbance excitation amplitudes.

This is a Master graduation/apprentice internship for 6 to 12 months, minimum 4 days per week (3 days onsite). The start date of this internship is as soon as possible.

**Your profile**:
To be a fit for this assignment, you:

- Are busy with your master's in Mechatronics or in Mechanical Engineering/Electrical Engineering with a specialization in Mechatronics or Dynamics and Control**;**
- Are proactive and have a hands-on mentality;
- Are skilled in MATLAB or Simulink;
- Have knowledge of lumped-mass dynamics modelling and frequency-domain control design (loopshaping approach);
- Have an affinity with experimental techniques (signal processing, data acquisition, FRF measurements);
- Have good communication skills in English (verbal and written).

**Other requirements you need to meet**:

- You are enrolled at an educational institute for the entire duration of the internship.
- You are located in the Netherlands to perform your internship. In case you are currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate.
- If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).

**Diversity and inclusion**:
ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.