Cathodoluminescence Tomography for Semiconductor
6 maanden geleden
**Cathodoluminescence tomography for semiconductor device inspection and analysis**:
**Work Activities**:
Did you know high-energy electrons can serve as efficient sources of optical excitation of matter? Our group has developed cathodoluminescence (CL) microscopy, in which we use 1-30 keV electrons in a scanning electron microscope (SEM) to excite nanomaterials. The oscillating electric field carried by the electron serves as a broadband (0-30 eV) excitation source with 5 nm spatial and 5 fs temporal resolution. This enables us to study excitations and localized modes of plasmons, 2D semiconductors, and a wide range of optical metamaterials. We study excitation dynamics through time-resolved spectroscopy, correlative measurements, holography and perform 3D tomography of complex geometries.
In this project, we will investigate the potential use of CL spectroscopy in a scanning electron microscope (SEM) as a tool for semiconductor metrology. We will collect angle-, polarization-, and time-resolved CL spectra on complex nanostructures composed of metal, semiconductor, and dielectrics, and aim to derive characteristic materials properties and feature sizes in 3D from the collected data sets. The project ranges from studies of simple model systems to complex structures like nanosheet transistors that are relevant for semiconductor manufacturing and uses tomographic techniques in combination with inverse design and machine learning tools. The aim is to determine the possibilities and limitations of the use of CL in semiconductor metrology and to develop practical workflows for CL tomography. The project will be carried out in close collaboration with the neighboring Advanced Research Center for Nanolithography (ARCNL) and the companies ASML and Delmic.
**Qualifications**:
- You have a master’s degree in physics, chemistry, materials science, or a related field.
- You have very strong social, organizational, and communication skills.
- You like to work both independently and in a collaborative team.
**Work environment**:
Our group is part of AMOLFs Nanophotonics and Light Management in new Photovoltaic Materials research centers that are composed of 8 research groups (50 PhD students and postdocs) that share a state-of-the-art cleanroom for nanofabrication and characterization and many other facilities.
**Working conditions**:
- The working atmosphere at the institute is largely determined by young, enthusiastic, mostly foreign employees. Communication is informal and runs through short lines of communication.
- The position is intended as full-time (40 hours / week, 12 months / year) appointment in the service of the Netherlands Foundation of Scientific Research Institutes (NWO-I) for the duration of four years
- The starting salary is 2.781 Euro’s gross per month and a range of employment benefits.
- After successful completion of the PhD research a PhD degree will be granted at a Dutch University.
- Several courses are offered, specially developed for PhD-students.
**More information?**:
For further information about the position, please contact:
Prof. dr. Albert Polman
Phone: +31 (0)20-754 7100
**Application**:
- Online screening may be part of the selection._
**Diversity code**:
AMOLF has won the NNV Diversity Award 2022, which is awarded every two years by the Netherlands Physical Society for demonstrating the most successful implementation of equality, diversity and inclusion (EDI).
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