PhD: Terahertz and optical metrology of semiconductor material changes

Work ActivitiesIn semiconductor device manufacturing, metrology tools are required for wafer alignment, overlay and device inspection. As devices become more complicated and as stronger light sources are being used to get sufficient signal from samples covered with optically opaque layers, optical damage can occur. Catastrophic damage is easily detected....

**Work Activities**: In semiconductor device manufacturing, metrology tools are required for wafer alignment, overlay and device inspection. As devices become more complicated and as stronger light sources are being used to get sufficient signal from samples covered with optically opaque layers, optical damage can occur. Catastrophic damage is easily...

Two PhD positions: Fano4nano - Fano resonance enhanced scatterometry for wafer metrologyWork ActivitiesAre you looking for a challenging project in which you develop fundamental advances in metaphotonics and work with high-tech industry to apply them? In this project we aim to develop nanophotonic structures for application in high-precision semiconductor...

**Cathodoluminescence tomography for semiconductor device inspection and analysis**: **Work Activities**: Did you know high-energy electrons can serve as efficient sources of optical excitation of matter? Our group has developed cathodoluminescence (CL) microscopy, in which we use 1-30 keV electrons in a scanning electron microscope (SEM) to excite...

**Work Activities**: Did you know high-energy electrons can serve as efficient sources of optical excitation of matter? Our group has developed cathodoluminescence (CL) microscopy, in which we use 1-30 keV electrons in a scanning electron microscope (SEM) to excite nanomaterials. The oscillating electric field carried by the electron serves as a broadband...

Phd - student: Nonlinear metaphotonics for UV semiconductor metrologyWork ActivitiesHow do you design optical metasurfaces that efficiently radiate UV light by nonlinear frequency conversion? How do the geometry of meta-atoms and their arrangement in the metasurface translate into beam structuring, i.e., control over the amplitude, phase and polarization...

Work Activities:Did you know high-energy electrons can serve as efficient sources of optical excitation of matter? Our group has developed cathodoluminescence (CL) microscopy, in which we use 1-30 keV electrons in a scanning electron microscope (SEM) to excite nanomaterials. The oscillating electric field carried by the electron serves as a broadband (0-30...

Work ActivitiesDid you know high-energy electrons can serve as efficient sources of optical excitation of matter? Our group has developed cathodoluminescence (CL) microscopy, in which we use 1-30 keV electrons in a scanning electron microscope (SEM) to excite nanomaterials. The oscillating electric field carried by the electron serves as a broadband (0-30...

PhD: Fano4nano - Fano resonance enhanced scatterometry for wafer metrology:Work Activities:We aim to develop a completely new class of metrology targets, based on novel nanophotonic scattering patterns taken from the optical metasurface community. Examples of such patterns are Fano-resonant metasurfaces that can provide responses in spectrum, polarization...

**PhD: Fano4nano - Fano resonance enhanced scatterometry for wafer metrology**: **Work Activities**: We aim to develop a completely new class of metrology targets, based on novel nanophotonic scattering patterns taken from the optical metasurface community. Examples of such patterns are Fano-resonant metasurfaces that can provide responses in spectrum,...

Postdoc: Machine learning for imaging and metrologyWork ActivitiesThe goal of the project is to develop new machine learning frameworks for high-resolution optical imaging and metrology. You will use the new methods to image complex wafer metrology targets and to improve the precision of modern methods of alignment and overlay metrology for the semiconductor...

**PhD-student: Nonlinear metaphotonics for UV semiconductor metrology**: **Work Activities**: How do you design optical metasurfaces that efficiently radiate UV light by nonlinear frequency conversion? How do the geometry of meta-atoms and their arrangement in the metasurface translate into beam structuring, i.e., control over the amplitude, phase and...

Work ActivitiesThe goal of the project is to learn more about the possible detrimental effects of electrons in scanning electron microscopy for metrology applications, on materials used in the semiconductor industry. As a PhD student you will use state of the art tools to unravel and quantify the physical and chemical changes at surfaces and within layers...

PhD-student: Nonlinear metaphotonics for UV semiconductor metrology:Work Activities:How do you design optical metasurfaces that efficiently radiate UV light by nonlinear frequency conversion? How do the geometry of meta-atoms and their arrangement in the metasurface translate into beam structuring, i.e., control over the amplitude, phase and polarization...

**PhD-student: Nanophotonics and quantum physics with electrons and light**: **Work Activities**: Did you know high-energy electrons can serve as efficient sources of optical excitation of matter? Our group has developed cathodoluminescence microscopy, in which we use 1-30 keV electrons in a scanning electron microscope (SEM) to excite nanomaterials. The...

**Work Activities**: Did you know high-energy electrons can serve as efficient sources of optical excitation of matter? Our group has developed cathodoluminescence microscopy, in which we use 1-30 keV electrons in a scanning electron microscope (SEM) to excite nanomaterials. The oscillating electric field carried by the electron serves as a broadband (0-30...

PhD-student: Nanophotonics and quantum physics with electrons and lightWork ActivitiesDid you know high-energy electrons can serve as efficient sources of optical excitation of matter? Our group has developed cathodoluminescence microscopy, in which we use 1-30 keV electrons in a scanning electron microscope (SEM) to excite nanomaterials. The oscillating...

**Two PhD positions: Metasurfaces for energy-efficient wave-based computing**: **Work Activities**: Metasurfaces are ultra-flat and compact nanophotonic elements that are pursued worldwide to replace conventional bulky optical elements like mirrors, lenses, and prisms. Going beyond simple optics replacements, metasurfaces can also perform data processing on...

Two PhD positions: Metasurfaces for energy-efficient wave-based computingWork ActivitiesAre you fascinated by the idea of using light for all-optical information processing? Can you envision optical metasurfaces that perform operations on data at the speed of light? Are you motivated to contribute to new technologies that realize radical improvements in the...

**Work Activities**: This project is part of a larger KIC project, “Foundations for electron-beam metrology and inspection”, in which knowledge institutes Delft University of Technology and ARCNL are working together with high-tech company ASML. You will perform this project in close collaboration with a team of PhD students and postdocs working on this...