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Applied Physics | Mechanical Engineering Internship: Development of Wafer Table Load Sequence Model

4 maanden geleden


Veldhoven, Nederland ASML Voltijd

Introduction

Are you a master student in Applied Physics, Mechanical or Aerospace Engineering, looking for an internship? Are you interested in fluid dynamics? Then this internship may be interesting for you

Background information

Within ASML, the Flow Modeling Group creates high quality analysis solutions to advise on design proposals in Multiphysics and other multiscale domains. The team has a common vision towards creating the Digital Twins of ASML lithography machines. Wafer Table (WT) is an essential part of the lithography machines. The main function of a WT is to support and clamp the wafer to the position module. Although WT is only a small part of the complete system, its interaction with the wafer makes it a significant contributor to overlay. A pre-clamp pressure is applied prior to the wafer landing while vacuum is enabled to hold the wafer on the WT during exposure. There are small structures (burls) all over the WT which come in contact with the wafer backside during loading. Loading and clamping a wafer on WT introduces clamping print (stress) that affects the overlay performance. It happens due to both thermal and mechanical reasons. The mechanical print is called Wafer Load Grid (WLG) which is friction induced in-plane deformation of the wafer. 

Your assignment

ASML Research has developed a WLG model for wafer loading on WT. It is a 2D axisymmetric COMSOL model that computes two-way fluid-structure interaction (FSI). This model is partially validated for existing WTs. However, future WTs require updated models based on the new features that are to be introduced. This assignment is for next generation WT designs that have several new features with respect to the existing immersion WT. Therefore, the present WT model needs to be updated and tested to check the new functionalities. 
 

Your tasks may include, but are not limited to:

Start from the existing FSI model, understand its main components corresponding to the functionalities, underlying physics and boundary conditions;

Study some proposed new WT functions, its load and unload sequence, and identify the new features with respect to the existing WT model;

Introduce each new feature step by step to the existing model; 

Test representative input variation, including load/unload sequence;

Prepare a report summarizing model descriptions, problem approach, relevant results and validation with theory or relevant test results.

Your profile

To be a match for this internship, you:

Are a master's student in the direction of Mechanical or Aerospace Engineering, Applied Physics or a related discipline;

Have a strong affinity with Physics and Flow dynamics;

Have some experience with Computational Fluid Dynamics (CFD) and 2D/3D flow modeling and structural modeling;

Have good communication skills in English (verbal and written).

This is an internship for 4-5 days a week with a duration of minimum 5-6 months. The start date is as soon as possible.

Please note that we can only consider students who are enrolled at a school for the entire duration of the internship.

Change the world – one nanometer at a time

Become an intern at a Dutch company that’s a global industry leader. You’ll gain valuable experience in a highly innovative environment – one that sparks your imagination and creativity. In addition to a monthly internship allowance of maximum €600 (plus a possible housing or travel allowance), you’ll get practical guidance from experts in the field and the chance to work in and experience a dynamic team environment.

ASML - be part of progress

ASML is a high-tech company headquartered in the Netherlands. We manufacture the complex lithography machines that chipmakers use to produce integrated circuits, or computer chips. What we do is at the heart of all the electronic devices that keep us informed, entertained and connected. Every day, you use electronics that simply wouldn’t exist without our machines.

Behind ASML’s innovations are engineers who think ahead. The people who work at our company include some of the most creative minds in physics, electrical engineering, mathematics, chemistry, mechatronics, optics, mechanical engineering, and computer science and software engineering.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students - getting ready for real-world R&D

We’re a global team > 40,000 people with > 140 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia and the US. In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country – or even working for a different company.

An internship at ASML is the opportunity to get to know not only the world of industrial-strength R&D, but yourself – you’ll discover just what excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

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