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Physics | Optics Internship: Development of Mirror Metrology for EUV Projection Optics

4 maanden geleden


Veldhoven, Nederland ASML Voltijd

Introduction

Are you a Master student in Physics or Optics looking for an internship? Are you interested in Optics? Are you skilled in Python and/or MATLAB? Would you like to develop a mirror metrology that can determine failure mechanisms from sensor measurements? Then this internship might be a match for you

Background information

The Optical Column (OC) is the heart of the EUV lithography systems. These systems push Moore's law and enable tomorrow's technology. The OC comprises every functionality related to the optical path, from collecting the EUV light from source to projecting the photomask image onto the wafer. Within the OC department, the EUV Projection Group is responsible for the transfer and de-magnification of the reticle image onto the wafer in the EUV scanners by means of advanced optical manipulations and corrections. We are responsible for the design, integration, qualification and troubleshooting of the optical performance in the projection modules in the EUV scanners. 

Your assignment

The Projection System consists of several mirrors that guide the EUV light from the photomask to the wafer. Maintaining high reflectivity and good surface flatness of these mirrors is critical to ensure that EUV systems produce a high number of wafers with high quality. In case of optical performance degradation, advanced metrology is required to determine which mirror in the optical system is failing and the failure mechanism from sensor measurements, and find the correct repair action.

The goal of this project is to develop mirror metrology that can determine from sensor measurements the failure mechanism in case of degradation. Knowledge on the failure mechanism is crucial to determine the correct repair action. Your task may include but not limited to:

Simulate sensor measurements by optics degradation;

Develop failure mode detection algorithm and study performance;

Apply algorithm on machine data;

Discuss results with the Optics Lifetime team.

Your profile

To be a match for this internship, you:

Are busy with your master's in Physics, Optics or in a related field;

Are skilled in tooling like Python and/or MATLAB;

Have analytical thinking and are motivated to learn;

Have good communication skills in English (verbal and written).

This is an internship for 5 days a week with a duration of 6 to 9 months. The start date is as soon as possible.

Change the world – one nanometer at a time

Become an intern at a Dutch company that’s a global industry leader. You’ll gain valuable experience in a highly innovative environment – one that sparks your imagination and creativity. In addition to a monthly internship allowance of maximum €600 (plus a possible housing or travel allowance), you’ll get practical guidance from experts in the field and the chance to work in and experience a dynamic team environment.

ASML - be part of progress

ASML is a high-tech company headquartered in the Netherlands. We manufacture the complex lithography machines that chipmakers use to produce integrated circuits, or computer chips. What we do is at the heart of all the electronic devices that keep us informed, entertained and connected. Every day, you use electronics that simply wouldn’t exist without our machines.

Behind ASML’s innovations are engineers who think ahead. The people who work at our company include some of the most creative minds in physics, electrical engineering, mathematics, chemistry, mechatronics, optics, mechanical engineering, and computer science and software engineering.

We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.

Students - getting ready for real-world R&D

We’re a global team > 40,000 people with > 140 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia and the US. In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country – or even working for a different company.

An internship at ASML is the opportunity to get to know not only the world of industrial-strength R&D, but yourself – you’ll discover just what excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?

How will you be part of progress?

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

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